Hetherington, Chang, Haigh, Nellist, Gontard, Dunin-Borkowski, Kirkland. High-Resolution TEM and the Application of Direct and Indirect Aberration Correction. Microscopy and Microanalysis. 14 60-67(2008).
Purpose of the Study
The purpose of the study was to apply a combination of both direct and indirect aberration correction to the high-resolution mode of a transmission electron microscope and to study the resulting images.
Methods
Delocalization in images has traditionally led to a difficulty in attaining high resolution micrographs. The development of direct and indirect aberration correction has led to an improvement in the resolution of HRTEM images. Direct aberration correction involves the insertion of elements below the objective lens to correct for spherical aberration. Indirect correction involves taking a series of tilt images and post-processing to remove aberrations.
The instrument used was a JEOL 200 kV FEG-STEM with both probe and imaging aberration correctors. The correctors are hexapoles which enhance resolution from 0.19 nm to less than 0.12 nm. Resolution is then limited by chromatic aberration and energy spread. Diffractograms tilted through a range of angles spaced 18 mrads apart are collected to create a wave aberration correction function.
Indirect and direct methods may be combined. Optical correction is taken to the third order with post-processing aberration coefficients giving a 5th order correction.
Key Findings
1. Restoration of the exit wavefunction reveals more structural detail
2. <111> Strontium Titanate showed a resolution improvement from 0.12 nm to 0.08 nm
3. Correction of pre- and post-field allows for large condenser and aperture sizes, which allows the instrument to be run as a scanning confocal electron microscope to produce depth of field measurements
Definitions
Confocal Imaging: An imaging technique where pinholes are used to eliminate out-of-focus light
Exit Wavefunction: Used to simulate images of the focal series and compare with experimental results in order to minimize delocalization
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