New system for secondary electron detection in variable-pressure scanning electron microscopy

Slowko, W. New system for secondary electron detection in variable-pressure scanning electron microscopy. Journal of Microscopy, Vol. 224. Pt. 1. October 2006. pp. 97-99.

Purpose of Study

Presenting a new secondary electron detection system that elimates the need for gas ionization and combines a two-stage detector head and a differential pumping system.

Methods

By adding a microsphere plate (MSP) to the standard Everhart-Thornley detector head in the scanning electron microscope. The MSP is an electron multipler used to view clearer images of the secondary electrons in various gas pressure and with various types of samples including biological samples.

Key Findings

1. The detector can work in high pressure or low pressure conditions.

2. To avoid scattering the electron beam, the distance d to the sample can be reduced.

3. Gas ionization is not needed. This elimates the poor images obtained in main approach to producing images of secondary electrons.

4. The new system is faster than previous systems as far as scanning rates.