Kazunori Hoshino, Member, IEEE, Lynn J. Rozanski,
David A. Vanden Bout, and Xiaojing Zhang, Member, IEEE
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 17, NO. 1, FEBRUARY 2008
Purpose
Near-field scanning optical microscopy (NSOM), combines scanning probe technology with optical microscopy. Conventionally, a fiber optic tip is assembled on the probe tip. This slows the fabrication process and requires an external light source. This purpose of this work is to integrate a nano-sized LED on the tip of the scanning probe.
Method
The fabrication can be divided into two parts: tip fabrication and LED fabrication.
Tip fabrication: started with a SoI wafer using the oxide as resist. An electrode was patterned on one side. The tip was subsequently etched to a tip.
LED fabrication: First the electrode part was doped, then trimmed with a focused ion beam (FIB) creating a 100nm gap. The probe was then charged in a solution of CdSe/ZnS core-shell nanoparticles of about 5nm in diameter. Electrostatic forces caused the nanoparticles to assemble and bridge the gap.
Results
The probe was successfully tested in a standard NSOM setup with the following observations.
- The electrode tip exhibited diode electrical behavior.
- A broad emission frequency was observed due to doping of the electrode in addition to the use of the ion beam for fabrication. (which can be mitigated by using an e-beam)
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